http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020049955-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-32 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate | 2019-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd95339f6533a61c8e7f94acde46b4a6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9545efccb44a548b9b6194cde627ba1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5117df5323734ea44e6f5d31d94aca51 |
| publicationDate | 2020-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2020049955-A1 |
| titleOfInvention | Chemical solution and substrate processing method |
| abstract | The present invention provides a chemical solution that has an excellent capacity to dissolve transition metal-containing materials and that ensures excellent smoothness of a processed part. The present invention also provides a substrate processing method. This chemical solution is used to remove transition metal-containing materials on a substrate and contains at least one hypochlorous acid compound selected from the group consisting of hypochlorous acid and salts thereof, and at least one specific anion selected from the group consisting of ClO3 - and Cl-. When the chemical solution contains one specific anion, the content of the one specific anion is 5 ppb to 1% by mass relative to the total mass of the chemical solution. When the chemical solution contains two specific anions, the content of each of the two specific anions is 1% by mass or less relative to the total mass of the chemical solution, and the content of at least one of the two specific anions is 5 ppb by mass or more relative to the total mass of the chemical solution. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230047416-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022114036-A1 |
| priorityDate | 2018-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 153.