| abstract |
The invention relates to a micro-sensor (100) for detecting ions in a fluid, comprising: a field effect transistor (5) having a source (51), a drain (52), an active region (54) between the source (51) and the drain (52), and a gate (53) disposed above the active region (54), an active layer (4), in which the active region (54) is formed, a dielectric layer (3) disposed under the active layer (4), a support substrate (1) disposed under the dielectric layer (3) and comprising at least one buried cavity (2) located beneath the gate (53) of the transistor (5) in order to receive the fluid. |