| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e0bf0928b608797b70bbc2b91c7e52e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D265-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 |
| filingDate |
2018-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3140a7aced92bc10cc0ca7f48c85b893
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9599027b1a642963a92c0e2db240b6c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e2dbf04961837c21507f9a92f3ee33a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e82d19c7fe263e92df99113f575926b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8a2718e8ce757c14e27287b218c78c6 |
| publicationDate |
2019-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2019110680-A2 |
| titleOfInvention |
Composition and process for selectively etching a layer comprising an aluminium compound in the presence of layers of low-k materials, copper and/or cobalt |
| abstract |
A composition for selectively etching a layer comprising an aluminium compound in the presence of a layer of a low-k material and/or a layer comprising copper and/or cobalt is described, and a corresponding use of said composition. Further is described a process for the manufacture of a semiconductor device, comprising the step of selectively etching at least one layer comprising an aluminium compound in the presence of a layer of a low- k material and/or a layer comprising copper and/or cobalt by contacting the at least one layer comprising an aluminium compound with the described composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021126340-A1 |
| priorityDate |
2017-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |