abstract |
According to the present invention, in a particle size distribution for a cerium oxide contained in a polishing liquid as obtained by a laser diffraction/scattering method, D5 is 1 μm or less, and the difference between D95 and D5 is 3 μm or more, assuming that a particle size is Dx[μm], when the cumulative particle volume cumulated from a small particle diameter side reaches x[%] of the total particle volume. |