http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019069939-A1

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filingDate 2018-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06423313b56e21e33feded0399f9486f
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publicationDate 2019-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2019069939-A1
titleOfInvention FRITTED ALUMINA BODY AND METHOD OF MANUFACTURING THE SAME
abstract The present invention relates to an alumina-based sintered body and a method for producing the same, which is suitably used or coated on, for example, a member used in a plasma processing apparatus, an etcher for manufacturing a semiconductor / liquid crystal display, a CVD apparatus, etc. The present invention relates to an alumina sintered body suitably used as a base material or the like of a plasma property member, and a method for producing the alumina sintered body.
priorityDate 2017-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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