abstract |
The present invention relates to an alumina-based sintered body and a method for producing the same, which is suitably used or coated on, for example, a member used in a plasma processing apparatus, an etcher for manufacturing a semiconductor / liquid crystal display, a CVD apparatus, etc. The present invention relates to an alumina sintered body suitably used as a base material or the like of a plasma property member, and a method for producing the alumina sintered body. |