| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G41-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G41-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2018-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c321a34bac024061cc42a7e02ea1c1c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d7422e268f9bffa99f0f8ee91bfe94f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0056e8f97dabf5779dba8349b519e431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65028f93059a99b77b06741d3519d3e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e4058451c2a14bbbc99eddabd303712 |
| publicationDate |
2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2019044601-A1 |
| titleOfInvention |
METHOD FOR TREATING TUNGSTEN OXIDE AND PROCESS FOR PRODUCING TUNGSTEN HEXAFLUORIDE |
| abstract |
The present invention relates to a process for converting tungsten oxide into a substance having a high vapor pressure selectively with respect to a tungsten metal at a reaction temperature which is less than 500 ° C without generating oxygen and water. to the reaction. Although tungsten hexafluoride rarely reacts with tungsten metal, tungsten oxide is brought into contact with tungsten hexafluoride according to the present invention and is converted into a fluorinated tungstate having a high vapor pressure by an expressed reaction. by the reaction formula (7) or the like. WO 3 + 2WF 6 → 3WOF 4 Reaction Formula (7) |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7273323-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020036026-A1 |
| priorityDate |
2017-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |