| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f3306928588a37a518e27ae01e4722c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-61 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B9-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G41-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G41-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B9-08 |
| filingDate |
2013-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5348e2c8fc636ab4f28cb953827c982b |
| publicationDate |
2014-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101376827-B1 |
| titleOfInvention |
Method for producing tungsten hexafluoride |
| abstract |
The present invention relates to a method for producing tungsten hexafluoride, the method of the present invention 1) fluorine, nitrogen trifluoride or 5 to 10 times the amount of oxygen contained in the tungsten raw metal tungsten containing oxygen Contacting the mixture of to remove oxygen to obtain a metal tungsten having an oxygen content of less than 500 ppm; And 2) preparing tungsten hexafluoride by reacting the metal tungsten having an oxygen content of less than 500 ppm obtained in step 1) with fluorine, nitrogen trifluoride or a mixture thereof. According to the method of the present invention, there is no need to stop the operation due to the blockage of the device, the pipe during operation or to clean the device. Operation with high operation rate is possible. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019044601-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112533873-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102381207-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107575731-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200087848-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7273323-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210041079-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020036026-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I716962-B |
| priorityDate |
2013-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |