| abstract |
Containing vanadium, silicon, carbon and nitrogen, and defining vanadium element concentration / (vanadium element concentration + silicon element concentration + carbon element concentration + nitrogen element concentration) in the film as a, silicon in the film When the element concentration / (the vanadium element concentration + the silicon element concentration + the carbon element concentration + the nitrogen element concentration) is defined as b, 0.30 ≦ a / b ≦ 1.3, and 0.30 ≦ a + b ≦ 0. 70. A vanadium carbonitride nitride film satisfying 70, and the sum of the vanadium element concentration, the silicon element concentration, the carbon element concentration, and the nitrogen element concentration in the film is 90 [at%] or more. |