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filingDate 2018-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9f7b36180e30ab3bb48ddac4cd4e029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f518f3a8073a77490a1d6274cbaa1546
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publicationDate 2019-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2019027181-A1
titleOfInvention PHOTOSENSITIVE RESIN COMPOSITION OF POSITIVE TYPE, PATTERN MADE THEREFROM, AND PATTERN MANUFACTURING METHOD
abstract The present invention is to provide a positive photoresist composition excellent in storage stability, sensitivity, developability, plating solution resistance and heat resistance. More specifically, an oligomer type specific dissolution inhibitor having the same repeating unit structure as the resin contained in the photoresist composition is applied to the composition.
priorityDate 2017-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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