| abstract |
Provided are: an adhesive film comprising an adhesive agent layer containing a thermosetting resin, a thermoplastic resin, and a heat conductive filler, wherein the heat conductive filler has a thermal conductivity of 12 W/m·K or more and is contained in an amount of 30-50 vol% in the adhesive agent layer, the thermoplastic resin contains at least one type of phenoxy resin, and the cured adhesive agent layer has a reliability coefficient S1 of 50-220 (× 10 -6 GPa) as calculated according to mathematical formula (1), a reliability coefficient S2 of 10-120 (× 10 -8 GPa) as calculated according to mathematical formula (2), and a thermal conductivity of 0.5 W/m·K or more; a tape for processing a semiconductor wafer; a semiconductor package; and a production method therefor. In mathematical formulas (1) and (2), S1, S2, Tg, CTEα1, a storage modulus E', and the saturated water absorption rate WA are of the adhesive agent layer after being cured. Tg represents a glass transition temperature, CTEα1 represents a linear expansion coefficient at the glass transition temperature or less, and the storage modulus E' is a value measured at 260ºC. In addition, units are given in brackets []. |