| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0416
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06711
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2017-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3785d03ba25c57ea1529cdb70d0c3de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77c2eaedd6e57f86fefff81e04e3bde7 |
| publicationDate |
2018-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2018100881-A1 |
| titleOfInvention |
Placement stand and electronic device inspecting apparatus |
| abstract |
Provided is an electronic device inspecting apparatus which allows curbing of rising costs. A prober 10 is provided with a stage 11 on which a carrier C and a wafer W are placed. The stage 11 is provided with a stage lid 27 on which the carrier C is placed, a cooling unit 29 which comes into contact with the stage lid 27, and an LED irradiation unit 30 which is arranged so as to face the carrier C across the stage lid 27 and the cooling unit 29. Each of the stage lid 27 and the cooling unit 29 is formed of a light transmitting member. A light transmittable refrigerant flows in a refrigerant flow path 28 in the cooling unit 29. The LED irradiation unit 30 has multiple LEDs 32 which are directed to the carrier C. The carrier C is formed of a glass substrate 24 having a substantially disc-like shape. A plurality of electronic devices 25 are arranged at a predetermined interval therebetween on a surface of the carrier C. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11740643-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020145260-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7090517-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7262249-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020047849-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022209903-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113325900-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230135064-A |
| priorityDate |
2016-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |