| abstract |
A water-repellent protective film forming agent for forming a water-repellent protective film on a surface of a wafer, said wafer including silicon, or a liquid chemical for forming a water-repellent protective film, in which liquid chemical the water-repellent protective film forming agent is dissolved in an organic solvent, said water-repellent protective film forming agent or liquid chemical for forming a water-repellent protective film being characterized in that the agent is at least one type of silicon compound selected from the group consisting of a sulfonimide derivative expressed by general formula [1], a sulfonimide derivative expressed by general formula [2], and a sulfonimide derivative expressed by general formula [3]. |