| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
2016-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5dc27d354509fc3ccda536ca269a563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c20f8faa2a54ff0f0f41ab2d03cc2f3 |
| publicationDate |
2017-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017081835-A1 |
| titleOfInvention |
Polishing agent for synthetic quarts glass substrate, process for producing same, and method for polishing synthetic quarts glass substrate |
| abstract |
The present invention is a polishing agent for synthetic quarts glass substrates which comprises abrasive grains and water, characterized in that the abrasive grains comprise a mixture of wet-process ceria grains and dry-process ceria grains, the mass ratio of the wet-process ceria grains to the dry-process ceria grains being 70/30 to 90/10. Due to this, the polishing agent has a high polishing rate and is highly effective in diminishing the occurrence of defects caused by polishing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018190077-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102580719-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114605921-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190138642-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019097945-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018177923-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019094373-A |
| priorityDate |
2015-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |