http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017068659-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b0120933550ea729b9f3186c3772531b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-6834 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67132 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2015-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d75ca4f0c70cd30603b549bb38979e9e |
| publicationDate | 2017-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2017068659-A1 |
| titleOfInvention | Surface protection adhesive tape for semiconductor wafer backgrinding, and semiconductor wafer grinding method |
| abstract | Provided are: a surface protection adhesive tape for semiconductor wafer backgrinding, said tape being composed of a substrate and an adhesive layer that is provided on one surface of the substrate, wherein the surface roughness of the substrate surface on which the adhesive layer is not formed is Rz = 0.7-5.0 μm, the total light transmittance of the surface protection adhesive tape for semiconductor wafer backgrinding at a wavelength of 500-600 nm is 40-80%, the difference between the color difference (ΔEM) of a mirror wafer and the color difference (ΔET) when the surface protection adhesive tape for semiconductor wafer backgrinding is bonded to the mirror wafer is ΔET-ΔEM > 6.5, and the surface protection adhesive tape for semiconductor wafer backgrinding is bonded to the surface of a semiconductor wafer having a notch; and a semiconductor wafer grinding method using said adhesive tape. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7260017-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023145926-A1 |
| priorityDate | 2015-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 82.