| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2016-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aed3da245984185c752ee62935ace589
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a8f8b0bc2364ca6fe941973232b8a30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47011ff9cd216381202d8c72529546e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eea986bf96407cf0822e8973c3924fe5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92e049ffbccc9d8548c4830a7d30b54a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05b6ed91178564dafa02099c8964d23b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6990198dd6b31314b784d3cde874cbe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e1bef0ed8cbd93f1d76640fb138e761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ef68b685111298911f38b704cb04323 |
| publicationDate |
2017-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017030073-A1 |
| titleOfInvention |
Wafer washing method, and liquid chemical used in same |
| abstract |
[Problem] To provide a liquid chemical used for forming a water repellent protective membrane, said liquid chemical being used in a wafer washing method in which a washing device that includes a vinyl chloride resin as a wetted member is used. [Solution] A liquid chemical is used, said liquid chemical including at least one compound selected from the group consisting of: an alkoxysilane represented by general formula [1]; a sulfonic acid represented by general formula [2]; an anhydrate of said sulfonic acid; a salt of said sulfonic acid; and a sulfonic acid derivative represented by general formula [3]. Also included in the liquid chemical is a dilution solvent having at least one compound selected from the group consisting of a hydrocarbon, ether, and thiol. [1] (R1) aSi (H)b (OR2)4-a-b [2] R3 – S(=O)2OH [3] R3 – S (=O)2 O-Si (H)3-c (R4)c |
| priorityDate |
2015-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |