| abstract |
The present invention relates to a novel absorbing antireflective coating composition comprising a novel crosslinkable polymer comprising at least one repeat unit (A) having structure (1), at least one repeat unit (B) having a structure (2), and at least one repeat unit (C) having structure (3) where D is a direct valence bound or C(R 1 )(R 2 ) methylene moiety where R 1 and R 2 are independently H, C 1 -C 8 alkyl, C 3 -C 24 cycloalkyl or C 6 -C 24 aryl; Ar i , Ar ii , Ar iii and Ar iv are independently phenylenic and naphthalenic moiety, R 3 and R 4 are independently hydrogen or C 1 -C 8 alkyl; and R 5 and R 6 are independently hydrogen or C 1 -C 8 alkyl; and a solvent. The invention also relates to a process for forming an image using the novel antireflective coating composition. |