http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015009745-A1

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publicationDate 2015-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2015009745-A1
titleOfInvention Ion assisted deposition for rare-earth oxide based thin film coatings on process rings
abstract A method of manufacturing an article comprises providing a ring for an etch reactor. Ion assisted deposition (IAD) is then performed to deposit a protective layer on at least one surface of the ring, wherein the protective layer is a plasma resistant rare earth oxide film having a thickness of less than 300 µm and an average surface roughness of less than 6 micro-inches.
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