Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de094784025e53546f898a3de5a5e393 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-162 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0037 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 |
filingDate |
2014-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4aa1aa868f5d640c5b6724a24a5e10c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f95075e5c4b4bafef4241c71a7c9e9a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27300f792f13ec82d661e3239f99a0d2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_514235ccc0ddaaf081c355e51824efb0 |
publicationDate |
2014-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2014197093-A2 |
titleOfInvention |
All water-based nanopatterning |
abstract |
The present application provides novel methods for the fabrication of nanostructures. More specifically, the invention relates to direct electron beam lithography with the use of silk fibroin as "green" resists. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109337892-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109337892-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10464361-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11009792-B2 |
priorityDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |