| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2063-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2096-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0388
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D151-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D151-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G59-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate |
2014-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0ba7b215ff6ec205b4a61d9c5a69209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d1a9f53b3909fe4bff7091e85364e5e |
| publicationDate |
2014-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2014157226-A1 |
| titleOfInvention |
Underlayer-film-forming composition for imprinting, and pattern formation method |
| abstract |
The present invention provides an underlayer-film-forming composition for imprinting, capable of forming an underlayer film having excellent surface flatness and adhesiveness. The underlayer-film-forming composition for imprinting is characterized in containing: (A) a resin having a weight-average molecular weight of 1000 or greater, the resin having unsaturated ethylene groups (P) and cyclic ether groups (T) selected from oxiranyl groups and oxetanyl groups; and (B) a solvent. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10246605-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I632188-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019172156-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7017623-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017170625-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016027843-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10754245-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016027843-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016031879-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10191375-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019172156-A1 |
| priorityDate |
2013-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |