| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9bceffddb90b9b3da8a772212961764b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed62b7551998e54b35784cdbbb2778d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02387
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-84 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate |
2013-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82ccd196850bcdf890a08f01a255bf67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b3187965781d8cab4692c16995bb7e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_caa28a354df9a551906ed23ac956f143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc8b7428ad7ee6cdc05cbbe54f54f822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64f3d45846b7f61be5e8b4de0109a471
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95910a021bf99e8b9745f9a2efd4a50a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35a082ad36d8f97f8af8eba7d5e437fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a3458af0d64ce3f03229f98b5547711
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d2491b1a5687cefeca31a596270040e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7aaf86445199882dbfa8f5196223ce95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c07122426a9ea980935216d9bbe996f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c23f0715af3b53116e79ace9cd0366ef |
| publicationDate |
2013-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013187079-A1 |
| titleOfInvention |
Method for producing composite substrate and composite substrate |
| abstract |
Provided is a method for producing a composite substrate having a semiconductor crystalline layer, wherein a sacrificial layer and a semiconductor crystalline layer are formed in succession on a substrate for forming a semiconductor crystalline layer; the semiconductor crystalline layer is etched such that a portion of the sacrificial layer is exposed; the semiconductor crystalline layer is partitioned into multiple partitioned units; a first surface, which is the surface of the layer formed on the substrate for forming a semiconductor crystalline layer, and a second surface, which is the surface of a transfer destination substrate formed from an inorganic material or a layer formed on the transfer destination substrate, are brought to face one another; the substrate for forming a semiconductor crystalline layer and the transfer destination substrate are bonded such that the first surface and the second surface contact; the substrate for forming a semiconductor crystalline layer and the transfer destination substrate are pressed under a pressure ranging from 0.01 MPa to 1 GPa; the sacrificial layer is etched; and the transfer destination substrate and substrate for forming a semiconductor crystalline layer are separated with the semiconductor crystalline layer remaining on the transfer destination substrate side. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021034586-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7363193-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020095610-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108461438-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020077710-A |
| priorityDate |
2012-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |