| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d21cbff64022f95c237c0bd3ec8656ca |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2252-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31855 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D137-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate |
2013-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d636325659942b8d97bf29eaa8deefb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13df937234e701694cd52c19c3a26a91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05d732e682c19a150b984ba6f19ff2ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ad36f51cc32cb1410da8f100dbe8d16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68380cd8ca93d89eaab15e7c88fd6b0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fdbcb12b79dccbee7726e44bde939f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b511201f28ad4a6354e8a09b2a2f3000
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d04611b31e95c2b267edcf61cfd3a59d |
| publicationDate |
2013-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013119832-A1 |
| titleOfInvention |
Anhydride copolymer top coats for orientation control of thin film block copolymers |
| abstract |
The present invention involves the use of random copolymer top coats that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous weak base and can change surface energy once they are deposited onto the block copolymer thin film. The use of self-assembled block copolymers to produce advanced lithographic patterns relies on their orientation control in thin films. Top coats potentially allow for the facile orientation control of block copolymers which would otherwise be quite challenging. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016193581-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015159281-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9181449-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015091047-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017514671-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3037071-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016088785-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11067893-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014162054-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9823568-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015142641-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3037070-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016107211-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016193582-A1 |
| priorityDate |
2012-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |