| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d21cbff64022f95c237c0bd3ec8656ca |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-839
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-811
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31931
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-788
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-809
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-152 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C43-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3405 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2013-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05d732e682c19a150b984ba6f19ff2ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_365413aa30465206a1db4e39e51984c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ad36f51cc32cb1410da8f100dbe8d16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13df937234e701694cd52c19c3a26a91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fdbcb12b79dccbee7726e44bde939f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d636325659942b8d97bf29eaa8deefb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d04611b31e95c2b267edcf61cfd3a59d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b511201f28ad4a6354e8a09b2a2f3000
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68380cd8ca93d89eaab15e7c88fd6b0c |
| publicationDate |
2013-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013119811-A1 |
| titleOfInvention |
Using chemical vapor deposited films to control domain orientation in block copolymer thin films |
| abstract |
The present invention uses vacuum deposited thin films of material to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nanostructured features in a block copolymer film that can serve as lithographic patterns. |
| priorityDate |
2012-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |