| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24331 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-02 |
| filingDate |
2012-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6ad162f6cb174b2adb270f4c2fa68eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ec7b9c3de5a8162cb6e965c3b82bb9f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c17d7e4fe60d61bcd81809083233b02a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_933b1cb7d7c4d16bf80542dc237bffd3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb99e8b45d21f7fe27f8cef1d61334f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d774e7a2abd8f707e20bad6817e42bed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1d2d75bd218c757551e2e0497e42fe3 |
| publicationDate |
2013-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013065475-A1 |
| titleOfInvention |
Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen |
| abstract |
The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an ionic liquid is formed in a thin-film-like or a webbing-film-like form on a sample is used. An electron microscopy using the observation specimen comprises: a step of measuring the thickness of a liquid medium comprising an ionic liquid on a sample; a step of controlling the conditions for irradiation with a primary electron on the basis of the thickness of the liquid medium comprising the ionic liquid; and a step of irradiating the sample with the primary electron under the above-mentioned primary electron irradiation conditions to form an image of the shape of the sample. |
| priorityDate |
2011-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |