| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0b5256d926a3098cead4534dd58c5c66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_680fe8db724f16a7e26be7d5b65c7cfb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98b4ceb2d310fa937b47765e7017412d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7876e4f2d71b47b79fd883defff1e04c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02359
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2012-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09cd863b17ba482a282a4161808fae60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9edb417c6a1b472d6270d90b076cb1f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3d6477ff1b7f4558ad033695c6d51ab |
| publicationDate |
2013-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013030516-A1 |
| titleOfInvention |
Method of modifying surfaces |
| abstract |
The invention provides a method for chemically modifying a surface of a substrate, preferably a silicon substrate, comprising the steps of providing a substrate having at least a portion of a surface thereof coated with an organic coating composition comprising unsaturated moieties forming a surface coating, and introducing a vapour phase reactive intermediate species based on a Group 14 or Group 15 element from the Periodic Table of Elements to the substrate whereupon said reactive intermediate species is able to react with a number of the unsaturated moieties in the coating composition thereby chemically modifying the surface coating. Also disclosed is a surface-modified substrate obtained or obtainable by the method, and uses thereof in the fabrication of MEMS and IC devices. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104233223-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014374934-A1 |
| priorityDate |
2011-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |