http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014374934-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0b0b875cbbdd4a39c2418462c42af5ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6d3fe2343df8a6e927bab7ca7be50a2f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-424 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-64 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-58 |
| filingDate | 2013-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f4cec93486467a192a16e0e56634c47 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb3343f3f083fd034eaf1080b3ccd461 |
| publicationDate | 2014-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2014374934-A1 |
| titleOfInvention | Method for strengthening semiconductor manufacturing tools |
| abstract | A method for strengthening semiconductor manufacturing tools is provided. The method includes providing a mold insert, forming a native oxide layer, attaching a release agent film, and forming a glass bonded SiO x release agent layer. With the method, a firm glass bonded SiO x release agent layer is formed uniformly on the surface of the mold insert to make the mold insert of semiconductor manufacturing tools much more resistant to abrasion and durable, extend the service life of the mold insert, cut production costs of semiconductor manufacturing, enable easy release of the mold insert, and speed up semiconductor manufacturing. Furthermore, the uniformity of the glass bonded SiO x release agent layer on the surface of the mold insert helps promote the yield when making sub-molds by the mold insert. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106808622-A |
| priorityDate | 2013-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.