| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a59568f3c44db29a48ec88c2a57bbfe7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-872
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-868
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6606
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2012-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d66334b2d2d0611783f7ad5cab1fc771 |
| publicationDate |
2013-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013011751-A1 |
| titleOfInvention |
Silicon carbide substrate, semiconductor device, method for producing silicon carbide substrate, and method for manufacturing semiconductor device |
| abstract |
A silicon carbide substrate (1) which is formed of single crystal silicon carbide and is capable of improving the yield of a semiconductor device by reducing the on-resistance. On one main surface (1A) of the silicon carbide substrate (1), sulfur atoms are present at a density of from 60 × 10 10 atoms/cm 2 to 2,000 × 10 10 atoms/cm 2 (inclusive) and oxygen atoms are present at a ratio of from 3 at% to 30 at% (inclusive). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015020945-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016174162-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5924462-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016063632-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10704163-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015065316-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10113249-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10732307-B2 |
| priorityDate |
2011-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |