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filingDate 2011-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dda529742055067ce4641b8ba6024706
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publicationDate 2012-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2012009959-A1
titleOfInvention Chemical mechanical polishing slurry
abstract Disclosed is a chemical mechanical polishing (CMP) slurry, comprising an activator, a strong oxidizer precursor, an abrasive, and water. The chemical mechanical polishing of the present invention enables a significant increase in the speed of tungsten polishing.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104562019-A
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priorityDate 2010-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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