| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_74415d2d575191b74012a38dc7a41110
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0ef57748c9cdfe38fc3745dd7558fde5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5af39726c844f29301088479282411c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f72badcb461cd83a8d052a34b6a01b0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1230d931759d9f6c658f0d084fe5e8cc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-526
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-9692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-9607 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K5-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2011-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6a278260bacaedaf621ee7727789878
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c93f25da147b69d41e1d7e489199d9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2842697130f83d5670ac3f134fabca3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c9dac252a1107c823fd5e174e04097a |
| publicationDate |
2011-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011099466-A1 |
| titleOfInvention |
Sintered objects and processes for producing same |
| abstract |
Provided is a sintered object which has excellent resistance to corrosion by corrosive halogen gases and by the plasmas thereof and has excellent thermal conductivity and excellent electrical conductivity. Even when applied to members for use in various vacuum process devices, the sintered object has little limitation in design. The sintered object is usable in a wide range of applications, and is highly versatile. Also provided is a process for producing the sintered object. Furthermore provided is a high-frequency transmission material which has direct-current electrical conductivity for reducing fluctuations in plasma potential and has capacitive properties that enable the material to transmit high-frequency power necessary for plasma excitation, and which has no fear of causing contamination of a sample with a metal and has resistance to corrosion by plasmas. Still further provided are: a sintered object which has excellent resistance to corrosion by corrosive halogen gases and by the plasmas thereof and has no frequency dependence when a high-frequency voltage is applied thereto and with which it is possible to actualize the stability of a plasma; and a process for producing the sintered object. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015083552-A1 |
| priorityDate |
2010-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |