| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3373b7ca74c39ad56cb8ce8037de33c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_914cd146aae117ea0666e46884be30f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a497b2e86c2c3839b19f920343c7e0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de2dded39164aa3477d3c1cc20f7ee5a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32788 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2010-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_019aef39906f7122a809ff0ad21428de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ebee180de14feea42c0f22d8fe041b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfb83ec5586a9a31b8d99d9c085de8e1 |
| publicationDate |
2010-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2010109373-A2 |
| titleOfInvention |
Method and apparatus for reduction of voltage potential spike during dechucking |
| abstract |
Provided is a substrate dechucking system of a plasma processing chamber adapted to remove a substrate from an ESC with reduction in voltage potential spike during dechucking of the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022072435-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315760-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D980884-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11373896-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7030144-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020098787-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9601363-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017139486-A |
| priorityDate |
2009-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |