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publicationDate 2010-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2010071255-A1
titleOfInvention Hardmask composition with improved storage stability for forming resist underlayer film
abstract Disclosed is a hardmask composition for forming a resist underlayer film. The hardmask composition comprises (A) an organosilane polymer and (B) at least one stabilizer. The hardmask composition is very stable during storage and allows a good pattern to be transferred to a material layer due to its excellent hardmask properties.
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