abstract |
A surface protection tape to be used in a dicing step protects the surface of a body to be cut from contamination due to adhesion of dusts, such as cutting dusts, in a dicing step by being adhered on the surface of the body to be cut and being cut with the body to be cut, and is easily peeled and removed from each chip after the dicing step. nThe surface protection tape for dicing is adhered on the surface of the body to be cut and is cut with the body to be cut. In the tape, a shrinkable film layer which shrinks at least in one axis direction due to stimulus and a restraint layer which restrains shrinkage of the shrinkable film layer are laminated. The tape peels, while winding by itself in one direction from one end or toward the center from the facing two ends and forming one or two tube-like wound bodies when stimulus to be the cause of shrinkage is applied. |