| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6deb55e9231a12d9fd6f62ed0dc01cc1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9b3ab5e9a0f9290f2b53a88727129641 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249921
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C24-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-02 |
| filingDate |
2009-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f5da9fb11314e5efdc6cd468856f645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c708d9ac766497b3608283cf529cab4 |
| publicationDate |
2010-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2010032543-A1 |
| titleOfInvention |
Surface treatment mask, process for producing the surface treatment mask, method for surface treatment, particle-containing film, and process for producing the particle-containing film |
| abstract |
Disclosed is a surface treatment mask comprising a film mask. Also disclosed are a process for producing the surface treatment mask, a method for surface treatment, an optical device, a particle-containing film, and a process for producing the particle-containing film. In the film mask, particles are arranged as a single layer without being superimposed on top of each other, or alternatively a group of particles containing first particles and second particles having a lower etching resistance than the first particles is contained. The method for surface treatment comprises placing the film mask on a surface of an object to be treated and etching the surface to form concaves and convexes. The optical device comprises a substrate which has been treated by the method for surface treatment. The particle-containing film comprises particles arranged as a single layer without being superimposed on top of each other. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I676860-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016163510-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016163510-A1 |
| priorityDate |
2008-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |