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filingDate 2009-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2009-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2009151745-A2
titleOfInvention Shear sensors and uses thereof
abstract The present invention relates to shear sensors. In particular, the present invention relates to deformable sensors for measurement of shear forces during chemical mechanical polishing.
priorityDate 2008-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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