| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fe77400488937dc481a561d6969c6ee8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dfecf3a31191626edab5c1b5a6111ed4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a058c4c04295fbe870d6d07ccb3232e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2203-0676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49103 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L19-0092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-6845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L5-228 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N3-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L5-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N3-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-04 |
| filingDate |
2007-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e3cb9367261ecaa19b0bdd0c4d22a01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ca6d64942b705aff97a1c67c50b79a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbb3ac75b51a2d231cef8bb4239c4399 |
| publicationDate |
2008-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008022778-A1 |
| titleOfInvention |
Microfabricated pressure and shear stress sensors |
| abstract |
A microfabricated pressure sensor. The pressure sensor comprises a raised diaphragm disposed on a substrate. The diaphragm is configured to bend in response to an applied pressure difference. A strain gauge of a conductive material is coupled to a surface of the raised diaphragm and to at least one of the substrate and a piece rigidly connected to the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8431080-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8162538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009016407-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102121859-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9665633-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8707796-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7644624-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009151745-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009151745-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008072682-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8418547-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008072683-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7661319-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010002407-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8393011-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012031192-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011185458-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010100989-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8056419-B2 |
| priorityDate |
2003-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |