| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_55cfb40b0f9e41477b353634653f608f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_29fea990a1690c0673f478be71944e1b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37cf08850960cb7e61e2ac7760077d68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a9d7b60cd171d9b73a1e603210dfdff |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-135 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 |
| filingDate |
2007-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e5e39dec1da24bbb5cd64a6e7f04c21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5f9925c799d92e606fadd085a479b6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf3c13cf6a3138c00cfc8136afe6dd7e |
| publicationDate |
2008-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2008156226-A1 |
| titleOfInvention |
Apparatus for depositing organic thin film |
| abstract |
An apparatus for depositing an organic thin film is disclosed. The organic thin film deposition apparatus includes a deposition chamber, and a deposition source assembly detachably installed in the deposition chamber and having a plurality of point-type deposition sources spaced apart from each other and arranged linearly, wherein the separation distances among the point-type deposition sources are decreased from a center of the deposition source assembly to outside. This apparatus may very conveniently control uniformity of thin film deposition using the deposition source assembly. |
| priorityDate |
2007-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |