patent/US-2005008778-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005008778-A1

Outgoing Links

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filingDate	2002-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66404365c922bf5e73f2a0e316367755 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79b531152fb8ea715475780900a08b82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ff5236983a6356c4c981e3c1f795561 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_034de5b8d69cb0261ecf9b158caecfa3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ceaf80bf12ed67799ed83548b069e45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c00c39137299286e53bdbdeb7fac39f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12c36e89b2d59671b9abd0f27db88331
publicationDate	2005-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2005008778-A1
titleOfInvention	Device and method for vacuum film formation
abstract	A vacuum deposition apparatus is used for deposit evaporated substance from evaporation sources ( 6 a and 6 b ) on the desired position of a flexible substrate ( 1 ). While the flexible substrate ( 1 ) is carried using rollers in a vacuum, shutters ( 8 a and 8 b ) are opened and closed to control the movement of the evaporated substance via openings. A film having a desired shape of pattern is formed on the flexible substrate ( 1 ) with higher controllability.
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priorityDate	2001-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 109.