| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_765b0b391a0d9222cadcf2a50d73a60a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cdd94f212dc7aef02fc1dcf28fa9b4fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c2832ccebdc0a97000d735cec508ca82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc7528b231260ba51cfb000616021671 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2007-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81d24bb6449eb102d35a364fc5fb001f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ba9553d6b01e0fe10bfdb71dbb8ca0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48e3926b3e4217b145f870bd4a4a94c2 |
| publicationDate |
2008-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2008029622-A1 |
| titleOfInvention |
Thin film forming apparatus and thin film forming method |
| abstract |
Provided are a thin film forming apparatus and a thin film forming method wherein an atmospheric pressure plasma discharge is employed and floating fine particles are not mixed while a film is being formed of a base material by adjusting a gas flow resistance and supply and exhaust flow quantities. The flow resistance that a treatment gas receives at a time of passing through a coating space section between a treatment gas ejecting means and surfaces of a pair of roll electrodes is larger than a flow resistance that the treatment gas receives at a time of passing through a gap between the pair of roll electrodes. A gas exhaust flow quantity at the treatment gas ejecting means and that at the exhaust gas ejecting means are larger than a gas supply flow quantity at the treatment gas ejecting means. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011118408-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5503733-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102884223-A |
| priorityDate |
2006-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |