http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004189958-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cdd94f212dc7aef02fc1dcf28fa9b4fd |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 |
| filingDate | 2002-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe3c5132cb7dc49b6f69c3a4b0f53619 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fafc1303da2b7ee5e40cca0f3e87ba8a |
| publicationDate | 2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004189958-A |
| titleOfInvention | Plasma discharge treatment apparatus, plasma discharge treatment method, thin film and laminate manufactured by the method, optical film, polarizing plate using optical film, and image display device |
| abstract | An apparatus for forming a thin film having high productivity, which does not require a vacuum apparatus and high-temperature processing, and can perform high-speed continuous processing of a wide base material even by using an inexpensive and safe reaction gas such as nitrogen. A method of forming a multilayer laminate of uniform thin films, an optical film of a thin film laminate formed by this method, a polarizing plate and an image display device using the same. A base material having a pair of opposed electrodes having first and second electrodes and a discharge unit, the base material being processed while passing through a side of the discharge unit closer to one of the opposed electrodes is again used. A means is provided for supplying a reaction gas at atmospheric pressure or a pressure in the vicinity thereof between the base material that is transported to the discharge unit while passing on the side closer to the other electrode and reciprocates in the discharge unit. A plasma discharge treatment apparatus characterized in that different high-frequency voltage components are applied to the first and second electrodes. [Selection diagram] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5206411-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5167431-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102791777-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011111558-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111672507-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111672507-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009035724-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008029622-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2243859-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2243859-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016056390-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009104443-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011232569-A |
| priorityDate | 2002-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 218.