| abstract |
Disclosed is a polysiloxane having a structural unit represented by the general formula (III) or general formula (IV) below, which is obtained by polycondensating a silane compound represented by the general formula (I) or general formula (II) below in the presence of water. Also disclosed is a radiation-sensitive resin composition containing such a polysiloxane and a radiation-sensitive acid generator. (In the formulae, R1, R2, R3 and R4 are as defined in the description.) |