| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc51870636cdb2695822a13972aaa25e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8c68c15f1efff45527858b7d87bad134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_187e846387fceaf2f4a13d5d3f57a3c7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2006-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e76b4e18c90dff7c383c2ae34eada3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e5f6533288c8eed99ca2dab59109639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93c881a3b5dc76e6d832ce6fd704195c |
| publicationDate |
2007-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2007060859-A1 |
| titleOfInvention |
Polishing fluid for polishing aluminum films and method for polishing aluminum films with the same |
| abstract |
The invention provides a polishing fluid for aluminum films used in LSI or the like which can polish the surfaces of the films smooth at high speed and a method of polishing aluminum films with the fluid. A polishing fluid for polishing aluminum films which comprises a polycarboxylic acid exhibiting a first acid dissociation constant of 3 or below at 25°C, colloidal silica, and water and has a pH of 2 to 4; and a method of polishing aluminum films by using the fluid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010187091-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008213113-A |
| priorityDate |
2005-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |