Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e9f80a7ee9358afddc608f12876c4777 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d9f3ca41550d315642580237250c5b0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4964d998a4dcdf7f096703f95baebb68 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-246 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
filingDate |
2006-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55deaea02bdb12b4d399b04799d050ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_527d9bf38e5e2ac4842b7409c5b3d955 |
publicationDate |
2007-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2007050293-A1 |
titleOfInvention |
Delivering particulate material to a vaporization zone |
abstract |
It is an object of the present invention to provide an effective way of replenishing particulate material for vaporization. This object is achieved by a method for delivering material into a deposition chamber having a vaporization zone to vaporize such material to form a layer. The improvement includes providing a cartridge defining a cavity for receiving material under a controlled environment for preventing material contamination, receiving material from the cavity and translating such received material along a feed path to the vaporization zone and removably securing the cartridge to the deposition chamber. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013189713-A |
priorityDate |
2005-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |