| abstract |
A metal oxide film suitable for protection of metals, composed mainly of aluminum. There is provided a metal oxide film being a film of oxides of metals composed mainly of aluminum, having a thickness of 10 nm or greater, and exhibiting a moisture release rate from the film of 1E18 mol./cm2 or less. Further, there is provided a process for producing a metal oxide film, comprising carrying out an anodic oxidation of metals composed mainly of aluminum in a chemical solution of 4 to 10 pH value so as to obtain a metal oxide film. |