| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f4246e8fcebf17c365aced017a04c61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f64ab98f18c78ac3aa5a314bf48f28c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4483
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-20 |
| filingDate |
2006-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1c943d30568a3c2658fd0f6776b70f0 |
| publicationDate |
2006-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2006093913-A2 |
| titleOfInvention |
Piezoelectric micromachined ultrasonic transducer with air-backed cavities |
| abstract |
A piezoelectric micromachined ultrasonic transducer comprising a substrate and a first dielectric film formed on the substrate. An opening having a sidewall is formed through the substrate and first dielectric film. A bottom electrode is formed on the first dielectric film spanning the opening. A piezoelectric element is formed on the bottom electrode. A second dielectric film surrounds the piezoelectric element. A conformal insulating film is formed on the sidewall of the opening. A conformal conductive film is formed in contact with the bottom electrode and on the sidewall of the opening, wherein an open cavity is maintained in the opening. A top electrode is formed in contact with the piezoelectric element. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9815087-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9408588-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103429358-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4071589-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011505206-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011505205-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8148877-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10478858-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8692441-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009055767-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8008842-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009055767-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9592534-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012075129-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012075106-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015089453-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012143615-A |
| priorityDate |
2005-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |