| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f4246e8fcebf17c365aced017a04c61 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G10K11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G10K11-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0607
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-082 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B31D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-15 |
| filingDate |
2013-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_474274a5aa94c6aa751a1f57e018710c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b75c19e299d7f6d0f977827bcdd2288 |
| publicationDate |
2014-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8692441-B2 |
| titleOfInvention |
Method for forming an ultrasonic transducer, and associated apparatus |
| abstract |
A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018059067-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018068154-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10458957-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9862592-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10185863-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10829364-B2 |
| priorityDate |
2010-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |