| abstract |
The object of the present invention is to produce, with little variation and good reproducibility, a stain preventing film which exhibits high uniformity and is excellent in performance capabilities for preventing stains, such as water repellency, oil repellency, characteristics of wiping off a skin fat and an ink and the durability for repetition of wiping. A stain preventing film being formed on a substrate by the use of an organometallic compound having an organic group having a fluorine atom as a gaseous raw material for forming a thin film, characterized in that in a negative secondary ion measurement using a Tof-SIMS measurement device, the ratio of the detected intensity of NO3- ion to the total detected ion intensity is 1.0 X 10-3 or less, and in a positive secondary ion measurement, the ratio of the detected intensity of NH4+ ion to the total detected ion intensity is 1.0 X 10-4 or more. |