| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc4be988e56000ccb6da28eb662505ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a542402965408c0b2fe514a0154eb874 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-52 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J37-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-10 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07B61-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-383 |
| filingDate |
2004-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14254419854b046849133ce710a14d86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff64e35544ddc2804203aabe8f846253 |
| publicationDate |
2005-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2005019141-A2 |
| titleOfInvention |
Process for producing hexafluoroethane and use thereof |
| abstract |
A process for producing hexafluoroethane, comprising a step of distilling a crude hexafluoroethane containing chlorine compounds each having two carbon atoms to distill out hexafluoroethane as a top flow from the top of a distillation column and separate a hexafluoroethane mixture containing the chlorine compounds as a bottom flow from the bottom, and a step of contacting the bottom flow with hydrogen fluoride in the gas phase at a temperature of 300 to 500 °C in the presence of a fluorination catalyst to fluorinate the chlorine compounds. This process provides hexafluoroethane which can be used mainly as a cleaning gas in the production process of a semiconductor device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114436763-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114436763-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109970509-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005092823-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005092823-A2 |
| priorityDate |
2003-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |