| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cef5045e7639c28010832b4eae012eb1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2004-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0b06bd4a5534b66ab2e5e6554efba39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf7358e3a198cd4fdc032a92cf79cac6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3bd7b5e5f64d369cf5d3c899dc33266 |
| publicationDate |
2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2004083328-A2 |
| titleOfInvention |
Slurry compositions for use in a chemical-mechanical planarization process having non-spherical abrasive particles |
| abstract |
A chemical-mechanical abrasive composition for use in semiconductor processing uses abrasive particles having a non-spherical morphology. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011087739-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8680036-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1994112-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1994112-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005035678-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9163200-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007086665-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7223156-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101374922-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7087529-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7267784-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8440602-B2 |
| priorityDate |
2003-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |