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publicationNumber US-4549374-A
titleOfInvention Method for polishing semiconductor wafers with montmorillonite slurry
abstract Semiconductor wafers are polished with an abrasive slurry which is prepared by dispersing montmorillonite clay in deionized water. The pH of the slurry is adjusted to 9.5 to 12.5 by adding alkali such as NaOH and KOH.
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