Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc05229904be2987713acc8b41db7cd3 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-117 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-033 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 |
filingDate |
2004-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da50066e8250092556bd28e9f36fd3cf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8ce5ad88ebd5e3e15a940ebf9ac29c5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_417b120602587165331c4e56942a0d21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32eef90db69c65cedc54d843c1c655c6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e24b65f7a83c39fe51add3392a617a0e |
publicationDate |
2004-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2004077153-A2 |
titleOfInvention |
Photosensitive composition and use thereof |
abstract |
A composition that comprises a photopolymerizable compound containing at least two pendant unsaturated groups; at least one ethylenically unsaturated photopolymerizable polyalkylene oxide hydrophilic monomer; at least one nonionic surfactant; and at least one photoinitiator is provided. The composition also preferably contains at least one amine modified acrylic oligomer and a dye. Other conventional photoresist components such as photosensitizers, adhesion promoters, leveling agents and solvents may also be included in the composition. Such compositions are useful for forming a pattern on a substrate, such as patterning microlithographic circuits on a substrate. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2439639-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2439639-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7838196-B2 |
priorityDate |
2003-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |