http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004072576-A1

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filingDate 2004-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3df9ad27d14d7470ab80d624c2767781
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publicationDate 2004-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2004072576-A1
titleOfInvention Surface shape recognition sensor and method of producing the same
abstract A structure (113b) is composed of a canopy and a support section supporting the canopy substantially at the middle thereof. The area of the upper electrode (110b) of the support section as seen plane-wise is smaller than the area of the canopy. The structure is disposed on an upper electrode (110a) in a region above a lower electrode (105a) so that it is opposed to the individual lower electrodes (105a). The tip of a finger (1602), for example, which is a subject whose surface shape is to be detected is put in contact with the surface of the canopy of the structure (113b), and the support section of the structure (113b) whose canopy is now in contact with the subject of detection depresses part of the upper electrode (110a) toward the lower electrode (105a), thereby deforming the upper electrode (110a).
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Total number of triples: 28.